X-ray detection system for wavelength dispersive and energy dispersive spectroscopy and electron beam applications
US7928400B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 4, 2008 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Oct 16, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24425
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A detection system for wavelength-dispersive and energy-dispersive spectrometry comprises an X-ray detector formed from a solid-state avalanche photodiode with a thin entrance window electrode that permits the efficient detection of X-rays scattered from “light” elements. The detector can be tilted relative to the incident X-rays in order to increase the detection efficiency for X-rays scattered from “heavy” elements. The entrance window may be continuous conductive layer with a thickness in the range of 5 to 10 nanometers or may be a pattern of conductive lines with “windowless” areas between the lines. A signal processing circuit for the avalanche photodiode detector includes an ultra-low noise amplifier, a dual channel discriminator, a scaler and a digital counter. A linear array of avalanche photodiode detectors is used to increase the count rate of the detection system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.