Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions
US7928409B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 11, 2006 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Dec 21, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/065
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.