TFT array panel and fabricating method thereof
US7928441B2 · kind B2 · utility
1Cited by
2References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2009 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | Apr 2, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/60
Abstract
Disclosed is display part such as a TFT array panel comprising an aluminum layer, and a molybdenum layer formed on the aluminum layer. The thickness of the molybdenum layer may be about 10% to about 40% the thickness of the aluminum layer. As a result, a top surface of the aluminum layer may have a width about equal to a bottom surface of the molybdenum layer.Accordingly, it is an aspect of the present invention to provide a TFT array panel comprising an aluminum wiring on which aluminum protrusion is reduced or eliminated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.