Apparatus for controlling optical fringe generation member based on detected optical fringe and method therefor
US7929120B2 · kind B2 · utility
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3References
10Claims
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Key dates
| Filing date | Feb 12, 2008 |
| Grant date | Apr 19, 2011 |
| Priority date | — |
| Expiry date | May 16, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0641
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical fringe generation member control apparatus is provided. The control apparatus includes a detection unit that is configured to detect an optical fringe. Further, the control apparatus includes a control unit that is configured to control operation of a member on which the optical fringe is generated. The control unit controls the operation based on a detection result by the detection unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.