Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device

US7929192B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventor

• Thilo Sandner · Dresden, DE

Key dates

• Filing date: Mar 31, 2008
• Grant date: Apr 19, 2011
• Expiry date: May 31, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/058
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

In a method of fabricating a micromechanical structure, first, a deflectably supported two-dimensional structure is formed in a substrate and, then, is arranged in a package such that an integrated micromanipulator is arranged between the package and the two-dimensional structure so as to effect a deflection of the two-dimensional structure out of a plane of the substrate.