ASIC compensated pressure sensor with soldered sense die attach
US7930944B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2008 |
| Grant date | Apr 26, 2011 |
| Priority date | — |
| Expiry date | Nov 11, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/48091
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ASIC compensated pressure sensor includes a sense die, an ASIC chip, and supporting elements. The sense die includes a metallized surface for attaching the sense die to a mounting surface. The resulting solder joint provides a hermetic seal that is resistant to a wide range of media associated with different environmental conditions. The mounting surface can contain the ASIC and electronics for compensation or can be attached to another mounting surface, which contains the ASIC and electronics. Either configuration can include collars of different styles for ease of assembly and in turn can be attached to a mating connector. The mounting surface can possess a closely matched coefficient of thermal expansion to the sense die in order to enhance electrical stability of the output signal over a wide temperature and pressure ranges.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.