Oscillating, deflectable micromechanical element and method for use thereof

US7932788B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Harald Schenk · Dresden, DE
• Alexander Wolter · Dresden, DE
• Thilo Sandner · Dresden, DE
• Christian Drabe · Dresden, DE
• Thomas Klose · Althengstett, DE

Key dates

• Filing date: Apr 24, 2006
• Grant date: Apr 26, 2011
• Expiry date: Aug 19, 2026

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/0109
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.