Silicon production with a fluidized bed reactor integrated into a siemens-type process
US7935327B2 · kind B2 · utility
5Cited by
19References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 2006 |
| Grant date | May 3, 2011 |
| Priority date | — |
| Expiry date | Nov 9, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P20/129
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A fluidized bed reactor and a Siemens reactor are used to produce polycrystalline silicon. The process includes feeding the vent gas from the Siemens reactor as a feed gas to the fluidized bed reactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.