Method for making crystalline composition
US7935382B2 · kind B2 · utility
11Cited by
22References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2005 |
| Grant date | May 3, 2011 |
| Priority date | — |
| Expiry date | Sep 18, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01B21/0632
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A method of making a metal nitride is provided. The method may include introducing a metal in a chamber. A nitrogen-containing material may be flowed into the chamber. Further, a hydrogen halide may be introduced. The nitrogen-containing material may react with the metal in the chamber to form the metal nitride.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.