Sodium salt containing CIG targets, methods of making and methods of use thereof
US7935558B1 · kind B1 · utility
13Cited by
50References
7Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 19, 2010 |
| Grant date | May 3, 2011 |
| Priority date | — |
| Expiry date | Oct 19, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P70/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A sputtering target includes at least one metal selected from copper, indium and gallium and a sodium containing compound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.