Compound semiconductor epitaxial substrate and method for producing the same
US7935984B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 28, 2007 |
| Grant date | May 3, 2011 |
| Priority date | — |
| Expiry date | Jul 21, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0262
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There are provided a higher-performance compound semiconductor epitaxial substrate having improved electron mobility characteristics and its production method. The compound semiconductor epitaxial substrate includes a channel layer in which electrons travel and an epitaxial layer on each of a front side and a back side of the channel layer, wherein a total p-type carrier concentration A (/cm2) per unit area in the epitaxial layer on the back side of the channel layer and a total p-type carrier concentration B (/cm2) per unit area in the epitaxial layer on the front side of the channel layer satisfy the following expression (1):0<A/B≦3.5 (1)wherein A=(a concentration of all p-type carriers in an active state due to an acceptor impurity contained in the epitaxial layer on the back side of the channel layer)×(a total thickness of the epitaxial layer on the back side), and B=(a concentration of all p-type carriers in an active state due to an acceptor impurity contained in the epitaxial layer on the front side of the channel layer)×(a total thickness of the epitaxial layer on the front side).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.