Sealed capacitive sensor
US7938014B2 · kind B2 · utility
8Cited by
26References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2008 |
| Grant date | May 10, 2011 |
| Priority date | — |
| Expiry date | Feb 21, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/73257
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sealed capacitive sensor includes a substrate having a diaphragm forming a first plate of a capacitor; a second fixed plate of the capacitor spaced from the diaphragm and defining a predetermined dielectric gap and a sealing medium connecting together the substrate and fixed plate in an integrated structure and hermetically sealing the gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.