Patent · US Active

Supply end block for rotary magnetron

US7938943B2 · kind B2 · utility

0Cited by

3References

7Claims

0Family size

Assignee

VON ARDENNE Anlagentechnik GmbH · DE

Inventors

Hans-Juergen Heinrich · Ennepetal, DE
Goetz Teschner · Gelnhausen, DE
Thorsten Sander · Dresden, DE
Cornell Weidelt · Dresden, DE
Joern Brueckner · Rohrbach, DE

Key dates

Filing date	Oct 17, 2007
Grant date	May 10, 2011
Priority date	—
Expiry date	Mar 9, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3497
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A supply end block to supply a sputter cathode with a coolant and electrical voltage, includes a housing with a coolant connection and a current connection as well as a support shaft mounted to rotate, on which a target tube is fastened. The coolant connection and current connection are brought together directly at a feed site so that the coolant is brought to the potential of the applied electric voltage on entering the housing of the end block. Optimal cooling of the current feed is achieved, and optimal potential equalization of the coolant simultaneously occurs.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.