Method for generating a micromechanical structure

US7940439B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Denis Jung · Dresden, DE
• Christian Drabe · Dresden, DE
• Thilo Sandner · Dresden, DE
• Harald Schenk · Dresden, DE
• Thomas Klose · Althengstett, DE
• Alexander Wolter · Dresden, DE

Key dates

• Filing date: Mar 31, 2008
• Grant date: May 10, 2011
• Expiry date: Aug 4, 2029

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/04
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.