Apparatus for making crystalline composition

US7942970B2 · kind B2 · utility

Assignee

• Momentive Performance Materials GmbH · US

Inventors

• Dong-Sil Park · Schenectady, US
• Mark P. D'Evelyn · Fremont, US
• Myles Standish Peterson, II · Amsterdam, US
• John Thomas Leman · Schenectady, US
• Joell R. Hibshman, II · Delanson, US
• Fred Sharifi · Niskayuna, US

Key dates

• Filing date: Dec 20, 2005
• Grant date: May 17, 2011
• Expiry date: Jul 15, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T117/10
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A composition including a polycrystalline metal nitride having a number of grains is provided. These grains have a columnar structure with one or more properties such as, an average grain size, a tilt angle, an impurity content, a porosity, a density, and an atomic fraction of the metal in the metal nitride. An apparatus for preparing a metal nitride is provided. The apparatus may include a housing having an interior surface that defines a chamber and an energy source to supply energy to the chamber. A first inlet may be provided to flow a nitrogen-containing gas into the chamber. Raw materials may be introduced into the chamber through a raw material inlet. A second inlet may be provided to flow in a halide-containing gas in the chamber. The apparatus may further include a controller, which communicates with the various components of the apparatus such as, sensors, valves, and energy source, and may optimize and control the reaction.