Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates

US7943196B2 · kind B2 · utility

Assignee

• UT-BATTELLE, LLC · US

Inventors

• Anatoli V. Melechko · Oak Ridge, US
• Timothy E. McKnight · Greenback, US
• Michael A. Guillorn · Locke, US
• Bojan Ilic · Ithaca, US
• Vladimir I. Merkulov · Knoxville, US
• Mitchel J. Doktycz · Oak Ridge, US
• Douglas H. Lowndes · Knoxville, US
• Michael L. Simpson · Knoxville, US

Key dates

• Filing date: Nov 14, 2005
• Grant date: May 17, 2011
• Expiry date: Oct 15, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31678
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. A method includes depositing a catalyst particle on a surface of a substrate to define a deterministically located position; growing an aligned elongated nanostructure on the substrate, an end of the aligned elongated nanostructure coupled to the substrate at the deterministically located position; coating the aligned elongated nanostructure with a conduit material; removing a portion of the conduit material to expose the catalyst particle; removing the catalyst particle; and removing the elongated nanostructure to define a nanoconduit.