Method and system for producing tomographic image by optical tomography with processing of interference light signals
US7944568B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 23, 2008 |
| Grant date | May 17, 2011 |
| Priority date | — |
| Expiry date | Jul 22, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
When reflection light, reflected from a measurement target that has been irradiated with measurement light in such a manner to scan the measurement target, and reference light are combined in each wavelength sweep, interference light is detected as interference signals. When a thinning region in which the interference signals obtained by detecting the interference light in each wavelength sweep are thinned so that the interference signals that are used to produce the tomographic image remain is set, thinning is performed on the plurality of interference signals in the thinning region. Light intensity information about the measurement target in the thinning region is obtained, based on the interference signals for the respective wavelength sweeps, the interference signals remaining after thinning. The tomographic image in the thinning region is produced based on the obtained light intensity information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.