Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor
US7945414B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2006 |
| Grant date | May 17, 2011 |
| Priority date | — |
| Expiry date | Dec 9, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for detecting abnormality in a fluid supply line is provided that uses a fluid control apparatus with a pressure sensor so that abnormality of malfunction and sheet leaks of a plurality of valves incorporated into the fluid supply line can be checked easily, promptly and accurately by operating the flow rate control apparatus possessing the pressure sensor. Specifically, using a fluid supply line provided with the flow rate control apparatus possessing the pressure sensor equipped with a flow rate setting mechanism, a flow rate/pressure display mechanism, and/or a flow rate self-diagnosis mechanism, abnormality of the control valves, installed with the flow rate control apparatus and on the upstream side and downstream side thereof, is detected by using the pressure value displayed and/or the value diagnosed with a self-diagnosis mechanism of the flow rate control apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.