Patent · US Active

Multiple beam micro-machining system and method

US7947922B2 · kind B2 · utility

2Cited by

94References

15Claims

0Family size

Assignee

Orbotech Ltd. · IL

Inventors

Abraham Gross · Rehovot, IL
Zvi Kotler · Tel Aviv-Yafo, IL
Eliezer Lipman · Rishon LeZion, IL
Dan Alon · Nes Ziona, IL

Key dates

Filing date	Jan 8, 2009
Grant date	May 24, 2011
Priority date	—
Expiry date	Sep 17, 2029

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB23K2103/172
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A system for delivering energy to a substrate includes a laser energy source providing a plurality of laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.