Multi-beam ion/electron spectra-microscope
US7947951B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 20, 2007 |
| Grant date | May 24, 2011 |
| Priority date | — |
| Expiry date | May 17, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention is a multi-beam charged particle instrument that can simultaneously focus electrons and a variety of positive and negative ions, such as Gallium, Oxygen and Cesium ions, onto the same material target. In addition, the instrument has provision to simultaneously capture the spectrum of both secondary electrons and ions. The highly dispersive, high resolution mass spectrometer portion of the instrument is expected to detect and identify secondary ion species across the entire range of the periodic table, and also record a portion of their emitted energy spectrum. The electron energy spectrometer part of the instrument is designed to acquire the entire range of scattered electrons, from the low energy secondary electrons through to the elastic backscattered electrons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.