Optical multiwavelength window contamination monitor for optical control sensors and systems
US7948617B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2008 |
| Grant date | May 24, 2011 |
| Priority date | — |
| Expiry date | Jan 19, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/945
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A foreign-particle detection system for use with an optical instrument having a transmissive window with a first side and a second side includes a radiation source to emit a radiation signal, a diffusing reflector to diffusively spread the radiation signal emitted by the radiation source over the first side of the transmissive window, a radiation detector to detect, at the second side of the transmissive window, the diffusively spread radiation signal transmitted by the transmissive window, and to generate a detected radiation signal based on the detected diffusively spread radiation signal, and a computation module communicatively coupled to the radiation detector to detect a presence of foreign particles on at least one of the first side or the second side of the transmissive window based on at least the detected radiation signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.