Scanning probe microscope
US7954165B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2006 |
| Grant date | May 31, 2011 |
| Priority date | — |
| Expiry date | Jul 4, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope is provided, which can be stably used for a long time even if excitation efficiency varies during scan. A cantilever (5) is excited, and the cantilever (5) and a sample are subjected to relative scanning. A second-harmonic component detection circuit (31) detects second-harmonic component amplitude of oscillation of the cantilever (5) as integral-multiple component amplitude. The second-harmonic component amplitude is amplitude of a second-harmonic component having a frequency twice as high as excitation frequency. An excitation intensity adjustment circuit (33) controls excitation intensity based on the detected second-harmonic component amplitude such that the second-harmonic component amplitude is kept constant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.