Material supply system and method
US7955031B2 · kind B2 · utility
4Cited by
12References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2006 |
| Grant date | Jun 7, 2011 |
| Priority date | — |
| Expiry date | Jan 22, 2030 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G47/1421
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A system and a method for feeding a solid into a solid deposition system is described. Solid contained in a hopper is directed into a vibratory bowl. The frequency of the vibrations of the vibratory bowl can be modulated by a feedback system. The solid can then be entrained in a carrier gas which can flow to a distributor for deposition on a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.