Patent · US Active

Material supply system and method

US7955031B2 · kind B2 · utility

4Cited by
12References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 13, 2006
Grant dateJun 7, 2011
Priority date
Expiry dateJan 22, 2030

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB65G47/1421
  • WIPO fieldHandling
  • WIPO sectorMechanical engineering

Abstract

A system and a method for feeding a solid into a solid deposition system is described. Solid contained in a hopper is directed into a vibratory bowl. The frequency of the vibrations of the vibratory bowl can be modulated by a feedback system. The solid can then be entrained in a carrier gas which can flow to a distributor for deposition on a substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.