Method of making a piezoelectric device
US7955641B2 · kind B2 · utility
6Cited by
4References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2008 |
| Grant date | Jun 7, 2011 |
| Priority date | — |
| Expiry date | Dec 13, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
Abstract
A method of forming a piezoelectric device is disclosed. In one such method, a coating material is formed. The coating material has a piezoelectric precursor. The coating material is applied to a first electrode. The precursor is heated to a temperature that is above the Curie temperature of the precursor, but below the melting temperature of the precursor. While the precursor is above its Curie temperature, a voltage is applied across the precursor. While the voltage is applied across the precursor, the temperature of the precursor is reduced to below the Curie temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.