Hard amorphous carbon film
US7955691B2 · kind B2 · utility
6Cited by
4References
5Claims
0Family size
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Key dates
| Filing date | Nov 28, 2006 |
| Grant date | Jun 7, 2011 |
| Priority date | — |
| Expiry date | Dec 30, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An amorphous hard carbon film comprising a first amorphous carbon layer substantially consists only of carbon formed on a substrate surface and a second amorphous carbon layer substantially consists only of carbon formed on the surface of the first amorphous carbon layer, wherein the transmission electron microscope image of the first amorphous carbon layer is brighter than that of the second amorphous carbon layer when the cross section is observed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.