Method for forming fine concavo-convex patterns, method for producing optical diffraction structure, and method for copying optical diffraction structure
US7955785B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 18, 2007 |
| Grant date | Jun 7, 2011 |
| Priority date | — |
| Expiry date | Apr 6, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2230/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for forming fine concavo-convex patterns by using a relief formation material 3 having a relief formation layer 2 composed of a resin having thermoplasticity and a relief pattern sheet 6 having on a surface thereof fine concavo-convex patterns 5, wherein a photothermal conversion layer 7 is formed in the relief formation material 3 or the relief pattern sheet 6; the photothermal conversion layer 7 is irradiated with light 8 to make the photothermal conversion layer 7 generate heat in the state that the relief formation layer 2 is brought into contact with the fine concavo-convex patterns 5; and the fine concavo-convex patterns 5 are formed on the relief formation layer 2.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.