Optimization of the excitation frequency of a resonator
US7956543B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2006 |
| Grant date | Jun 7, 2011 |
| Priority date | — |
| Expiry date | Dec 28, 2027 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF02P3/01
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A radio frequency plasma generator power supply, including: an interface that receives a request to determine an optimal control frequency; an output interface configured to be connected to a plasma generation resonator; a power supply module configured to apply a voltage at a set point frequency to the output interface, the voltage, depending on its frequency, selectively unable to allow generation of plasma of the resonator on receipt of a request during a phase optimizing power supply frequency of the generator and able to allow generation of plasma of the resonator during an operating phase; an interface that receives an electrical measurement of power supply of the resonator; a module that determines optimal control frequency, successively provides various set point frequencies to the power supply module on receipt of a request, and determines an optimal control frequency depending on electrical measurements received by the reception interface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.