AFM probe with variable stiffness
US7958566B2 · kind B2 · utility
2Cited by
15References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2007 |
| Grant date | Jun 7, 2011 |
| Priority date | — |
| Expiry date | Nov 2, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an atomic force microscope (AFM) probe for use in an AFM, and more particularly, an AFM probe suitable for testing the topography and mechanical properties of a microstructure having a size on the order of micrometers or nanometers. To this end, an AFM probe according to the present invention comprises an elastically deformable frame having a fixed end and a movable end on one axis; an AFM tip supported by the movable end to be movable against a test sample in a direction of the axis; and a stopper provided on an inner surface of the frame to control a movement of the AFM tip within a predetermined range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.