Patent · US Active

Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates

US7959776B2 · kind B2 · utility

0Cited by

9References

1Claims

0Family size

Assignee

Applied Films GmbH & Co. · DE

Inventors

Jorg Krempel-Hesse · Neumarkt i.d.OPf., DE
Andreas Jischke · Alzenau, DE
Uwe SCHÜßLER · Aschaffenburg, DE
Hans Wolf · Niederrodenbach, DE

Key dates

Filing date	Nov 25, 2008
Grant date	Jun 14, 2011
Priority date	—
Expiry date	Nov 25, 2028

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/3407
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Claimed is a sputtering target system comprising a plurality of backing plates to be individually cooled. Each backing plate is provided on its back side with a meandering groove that is closed off by a sealing plate. The sealing plate is welded around its circumference to the backing plate and at the same time is welded to at least one ridge located at a distance from the frame, which separates two grooved sections from one another. The sealing plate thus welded to the backing plate not only closes off the grooves to form a cooling channel, but also is used for reinforcement of the otherwise relatively flat backing plate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.