Patent · US Active

Microengineered electrode assembly

US7960693B2 · kind B2 · utility

5Cited by

17References

45Claims

0Family size

Assignee

Microsaic Systems Limited · GB

Inventors

Richard Syms · London, GB
Alan Patrick John Finlay · Hereford, GB

Key dates

Filing date	Jul 23, 2008
Grant date	Jun 14, 2011
Priority date	—
Expiry date	Jun 12, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J49/065
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Microengineered stacked ring electrode assemblies capable of acting as either RF or DC ion guides in an ion optical system, and method of fabricating same are described. The electrodes are fabricated using planar processing as sets of grooved, proud features formed in a layer of material lying on an insulating substrate. Two such structures are then stacked together to form a set of diaphragm electrodes with closed pupils. Arrangements for fabrication by patterning, etching and bonding are described, together with methods for tapering the electrode pupils or otherwise varying the ion path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.