Device and method for manufacturing a particulate filter with regularly spaced micropores
US7960708B2 · kind B2 · utility
25Cited by
8References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2007 |
| Grant date | Jun 14, 2011 |
| Priority date | — |
| Expiry date | Jul 16, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249921
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Various embodiments disclose devices and methods for fabricating microporous particulate filters with regularly space pores wherein sheet membrane substrates are exposed to energetic particle radiation through a mask and the damaged regions removed in a suitable developer. The required depth of field is achieved by using energetic particles to minimize diffraction and an energetic particle source with suitably small diameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.