Patent · US Active

Thermal control of optical filter with local silicon frame

US7961374B2 · kind B2 · utility

8Cited by
1References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 28, 2010
Grant dateJun 14, 2011
Priority date—
Expiry dateJun 28, 2030

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T156/1074
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Briefly, in accordance with one or more embodiments, a thermally controlled optical filter comprises a frame coupled to an etalon where the frame includes a resistive thermal device disposed on the frame to obtain thermal measurements of the etalon during operation. The frame may be generally L-shaped or generally square-shaped. The frame may include a fillet that is generally planar, generally beveled or trapezoidal, or generally circular in shape. A heater may be additionally disposed on the frame. The etalon and frame subassembly may be bonded to a micro hot plate that is capable of heating the etalon to an operational temperature.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.