Distortion evaluating apparatus and distortion evaluating method
US7962303B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2006 |
| Grant date | Jun 14, 2011 |
| Priority date | — |
| Expiry date | Apr 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2200/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A distortion evaluating apparatus which can quantitatively evaluate distortion in a measurement object surface is provided. A distortion evaluating apparatus evaluates distortion based on three-dimensional measurement data obtained from a measurement object surface. The apparatus includes a secondary differential component adapted for effecting a secondary differential operation on two-dimensional measurement data of a cross section of the measurement object surface indicative of unevenness therein, thus obtaining curvature data of the cross section, a permissible range setting component adapted for setting a permissible range for the curvature data, based on range of an upper limit value and a lower limit value from a reference value, and a distortion data extracting means component adapted for extracting a portion of the curvature data exceeding the set permissible range as distortion data indicative of the distortion in the cross section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.