Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element
US7965021B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 27, 2010 |
| Grant date | Jun 21, 2011 |
| Priority date | — |
| Expiry date | Jul 27, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention includes: a LaNiO3 film having a (001) orientation; an interface layer having a (001) orientation and composed of a compound represented by a chemical formula ABO3 (where A is represented by (Bi,Na)1-xCx (0≦x≦1), B is Ti or TiZr, and C is an alkali metal other than Na); and a (Bi,Na,Ba)TiO3 film having a (001) orientation. The LaNiO3 film, the interface layer, and the (Bi,Na,Ba)TiO3 film are laminated in this order.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.