Substrate storage container
US7967147B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 26, 2007 |
| Grant date | Jun 28, 2011 |
| Priority date | — |
| Expiry date | Jan 30, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67369
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate storage container includes a container body capable of storing a plurality of substrates in array, a lidding body, and a retainer for retaining substrates therebetween. The retainer includes a plurality of flexible and elastic pieces that are extended from the interior side of the lidding body in the direction of substrates stored in the container body and arranged in the direction of the array of the plurality of substrates, and holding groove pieces each formed with the elastic piece for touching and holding the rim of the substrate. The elastic piece with holding groove piece is gradually curved outwardly with respect to the width direction of the substrate from the interior side of the lidding body toward the substrate, so as to reduce the contact-holding area of the holding groove piece with the rim of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.