Integrated circuit system with clean surfaces

US7968148B2 · kind B2 · utility

Assignee

• GlobalFoundries Singapore Pte. Ltd. · SG

Inventors

• Yin-Min Felicia Goh · Singapore, SG
• Zainab Ismail · Singapore, SG
• Yong Siang Tan · Singapore, SG
• Ling Tan · Raleigh, US
• Sin Ping Chiew · Kuala Lumpur, MY

Key dates

• Filing date: Sep 13, 2007
• Grant date: Jun 28, 2011
• Expiry date: Sep 13, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67075
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

An integrated circuit system includes providing an integrated circuit wafer; applying a first cleaning solution over the integrated circuit wafer; and applying a second cleaning solution over the integrated circuit wafer to prevent or remove a defect resulting from the first cleaning process.