MEMS mirror driven by one motion with oscillations of different frequency for bidirectional rotation
US7969637B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 30, 2008 |
| Grant date | Jun 28, 2011 |
| Priority date | — |
| Expiry date | Nov 30, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0858
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) mirror system has an actuator that imparts a motion with a first periodic movement of high frequency superimposed a second periodic movement of low frequency to a frame and a mirror coupled to the frame so that the mirror rotates about two axes. The mirror is coupled by springs to the frame so the mirror is rotatable about a first axis. The frame has pivots each coupled by springs to actuators so the frame is rotatable about a second axis. The mirror has a first resonant frequency and the frame including the mirror has a second resonant frequency. The low frequency of the second periodic movement is equal to one of the first and the second resonant frequencies, and the high frequency of the first periodic movement is equal to the other one of the first and the second resonant frequencies.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.