Arrangement for RF power delivery to a gas discharge laser with cascaded transmission line sections
US7970037B2 · kind B2 · utility
5Cited by
24References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2009 |
| Grant date | Jun 28, 2011 |
| Priority date | — |
| Expiry date | Jun 10, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2232
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
RF power is transmitted to a CO2 gas discharge laser form a source of RF power via a series combination of transmission line sections. The lengths and characteristic impedances of the transmission line sections are selected to transform the impedance of the RF power source to the operating impedance of the laser.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.