Patent · US Active

Quartz window gas sensor with heated membrane

US7971471B2 · kind B2 · utility

0Cited by

5References

9Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Werner Grosse Bley · Bonn, DE
Daniel Wetzig · Cologne, DE

Key dates

Filing date	May 4, 2007
Grant date	Jul 5, 2011
Priority date	—
Expiry date	Dec 12, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01M3/205
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The gas sensor has a selectively permeable membrane which is composed of silicon material and is provided with a heating device on the outside. The membrane closes an evacuated housing which contains a pressure sensor. When evacuating the area surrounding the housing, the heat dissipation is changed as a result of the quick change in the total pressure of the surrounding air, with the result that signal drift arises despite temperature regulation of the membrane. The disclosure provides at least one second heating device whose temperature is regulated independently of the first heating device. As a result, the membrane temperature is highly constant even in the case of severely changing total pressure in the housing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.