Computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects
US7975245B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 20, 2008 |
| Grant date | Jul 5, 2011 |
| Priority date | — |
| Expiry date | Sep 7, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/318371
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Various computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects are provided. One computer-implemented method for determining if actual defects are potentially systematic defects or potentially random defects includes comparing a number of actual defects in a group to a number of randomly generated defects in a group. The actual defects are detected on a wafer. A portion of a design on the wafer proximate a location of each of the actual defects in the group and each of the randomly generated defects in the group is substantially the same. The method also includes determining if the actual defects in the group are potentially systematic defects or potentially random defects based on results of the comparing step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.