Micromachined sensor for measuring vibration
US7975550B2 · kind B2 · utility
1Cited by
10References
18Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 29, 2008 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Oct 10, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01H11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is provided a micromachined sensor for measuring a vibration, based on silicone micromachining technology, in which a conductor having elasticity is connected to masses moving due to a force generated by the vibration and the vibration is measured by using induced electromotive force generated due to the conductor moving in a magnetic field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.