Droplet removing device and method in plasma generator
US7976612B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 24, 2006 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Nov 10, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A device for removing droplets in a plasma generator including a tubular traveling passage through which plasma and droplets travel under mixed state is formed, an aperture having a passing hole at an eccentric position is provided in the tubular traveling passage, and a magnetic field generator passing the plasma through the eccentric passing hole of the aperture arranged on an outer circumference of the tubular traveling passage. The plasma further passes through the eccentric passing hole of the aperture after being bent in the tubular traveling passage by a magnetic field generated from the magnetic field generator and the droplets are removed by colliding against the wall face of the aperture at the time of bending.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.