Crystal film fabrication
US7976629B2 · kind B2 · utility
Inventor
Key dates
| Filing date | Feb 18, 2008 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Mar 21, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S117/915
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Processes and machines for producing large area sheets or films of crystalline, polycrystalline, or amorphous material are set forth; the production of such sheets being valuable for the manufacturing of solar photovoltaic cells, flat panel displays and the like. The surface of rotating cylindrical workpiece (10) is implanted with ion beam (30), whereby a layer of weakened material is formed below the surface. Sheet (20) is detached and peeled off, producing arbitrarily large, monolithic sheets. The sheet may be supported on a temporary or permanent handle (50) such as a glass sheet or a polymer film. Pinch roller (60) may assist in the lamination of handle (50) to sheet (20) before or after the point of separation of sheet (20) from workpiece (10). The implantation, annealing and separation processes are adapted to encourage the material to separate along the implanted layer rather than a particular crystal plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.