Multilayer structure with zirconium-oxide tunnel barriers and applications of same
US7977668B2 · kind B2 · utility
20Cited by
9References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2008 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Feb 8, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49014
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A multilayer structure with zirconium-oxide tunnel barriers. In one embodiment, the multilayer structure includes a first niobium (Nb) layer, a second niobium (Nb) layer, and a plurality of zirconium-oxide tunnel barriers sandwiched between the first niobium (Nb) layer and the second niobium (Nb) layer, wherein the plurality of zirconium-oxide tunnel barriers is formed with N layers of zirconium-oxide, N being an integer greater than 1, and M layers of zirconium, M being an integer no less than N, such that between any two neighboring layers of zirconium-oxide, a layer of zirconium is sandwiched therebetween.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.