MEMS element, MEMS device and MEMS element manufacturing method
US7977757B2 · kind B2 · utility
4Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2006 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Aug 6, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0132
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An MEMS element (A1) includes a substrate (1), and a first electrode (2) formed on the substrate (1). The MEMS element (A1) further includes a second electrode (3) including a movable portion (31) spaced from the first electrode (2) and facing the first electrode. The movable portion (31) is formed with a plurality of through-holes (31a). Each of the through-holes (31a) may have a rectangular cross section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.