Controlled growth of a nanostructure on a substrate, and electron emission devices based on the same
US7977761B2 · kind B2 · utility
14Cited by
8References
15Claims
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Key dates
| Filing date | Mar 16, 2010 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Mar 16, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/939
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention provides for an array of nanostructures grown on a conducting substrate. The array of nanostructures as provided herein is suitable for manufacturing electronic devices such as an electron beam writer, and a field emission device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.