Multi-actuation MEMS switch
US7978045B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2009 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Mar 4, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P1/127
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A multi-actuation MEMS switch for high frequency signals includes a substrate, a heater disposed on the substrate, a co-planar waveguide disposed on a lowest metal layer, and a movable membrane including at least two metal layers, and an dielectric layer disposed between the co-planar waveguide and the movable membrane. The movable membrane is a fixed-fixed beam structure with a center indentation. When heat is generated and conducted to the movable membrane or electrostatic force is generated between the movable membrane and the co-planar waveguide or both forces are generated, the movable membrane will bend toward the co-planar waveguide. The position of the movable membrane change capacitance on signal line for switching the RF signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.