Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same
US7978292B2 · kind B2 · utility
8Cited by
28References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2004 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Sep 5, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention is directed to simultaneously etching thin films to different uniform depths depending on positions by using a photoresist pattern having different thickness depending on positions as an etch mask in order to form a contact hole for a gate pad along with at least one other layer, or a data wire and a semiconductor pattern, via a single photolithography step.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.