Nanoscale optical tomography based on volume-scanning near-field microscopy

US7978343B2 · kind B2 · utility

Assignee

• The Board of Trustees of the University of Illinois · US

Inventors

• Jin-Won Sun · Seoul, KR
• John Carl Schotland · Yeadon, US
• Rainer Hillenbrand · Königsbrunn, DE
• Paul Scott Carney · Champaign, US

Key dates

• Filing date: Mar 17, 2009
• Grant date: Jul 12, 2011
• Expiry date: Dec 24, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q60/22
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus and methods for nanoscale optical tomography based on back-scattering mode near-field scanning optical microscopy with a volumetric scan of the probe. The back-scattered data collected by a volumetric scan of the probe contains three-dimensional structural information of the sample, which enables reconstruction of the dielectric sample without other mechanical movements of the instrument.