System and method for the inspection of micro and nanomechanical structures
US7978344B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2006 |
| Grant date | Jul 12, 2011 |
| Priority date | — |
| Expiry date | Dec 4, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The system for surface inspection is arranged to detect relative displacement and/or vibration features of a plurality of points of a plurality of elements (51) forming part of a mechanical structure (5), such as a micro- or nanomechanical structure. A light beam is displaced along the mechanical structure along a first trajectory (A), so as to detect a plurality of subsequent reference positions (C) along said first trajectory (A), and the light beam is further displaced along the mechanical structure along a plurality of second trajectories (B), each of said second trajectories (B) being associated with one of said reference positions (C).The invention further relates to a corresponding method and to a program for carrying out the method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.